[9p-Z25-1~6] 7.3 Micro/Nano patterning and fabrication

[9p-Z25-4] Fabrication of flexible two-stage through electrode using transfer method

〇Atsuhiro Furuta¹, Jun Taniguchi¹ (1.Tokyo Univ. of sci)

Keywords:nanoimprint, interposer

A silicon through electrode using silicon is mainly used as a through electrode, which is a connection method excellent in terms of device miniaturization and high density. In this study, a flexible through electrode was made in two stages.