Kosuke Suzuki

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15a-PB3-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 11:30 AM

[15a-PB3-6] Micro-Bending Test of Gold Micro-Cantilevers and the effect of width and thickness

〇(M1)Kosuke Suzuki¹, Ken Hashigata¹, Keisuke Asano¹, Chun-Yi Chen¹, Tso-Fu Mark Chang¹, Takashi Nagoshi², Daisuke Yamane¹, Katsuyuki Machida¹, Hiroyuki Ito¹, Kazuya Masu¹, Masato Sone¹ (1.titechi, 2.AIST)

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