The 67th JSAP Spring Meeting 2020

Session information

Poster presentation

13 Semiconductors » 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15a-PB3-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB3 (PB)

△:Presentation by Applicant for JSAP Young Scientists Presentation Award
▲:English Presentation
▼:Both of Above
No Mark:None of Above

9:30 AM - 11:30 AM

〇(B)Yuto Honda1, Sawako Tanaka1, Yong-Joon Choi1, Kazuaki Sawada1, Toshihiko Noda1, Kazuhiro Takahashi1, Hiromu Ishii1, Katsuyuki Machida2, Yasuhiko Nikaido3, Mitsumasa Saito3, Shinichi Yoshida4 (1.Toyohashi Univ. of Technology, 2.Tokyo Inst of .Technology, 3.Univ. of Occupational and Environmental Health, 4.Fukuoka Megumi Hospital)

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