Fuminobu Imaizumi

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15a-PB3-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 11:30 AM

[15a-PB3-7] Measurement Value Variation of 3-dimensional Acceleration Sensor

〇Fuminobu Imaizumi¹, Sumihisa Kumada (1.NIT, Oyama)