Masakazu Hirai

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15a-PB3-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 11:30 AM

[15a-PB3-2] Developement of Fabrication Process for Si Nano-wall Array

〇Masakazu Hirai¹, Yukimi Ichikawa¹, Makoto Konagai¹ (1.Tokyo City Univ.)