Takuma Yamashita

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

3:45 PM - 4:00 PM

[14p-A305-8] Development of non-destructive interface state density measurement technique by pulsed photoconductive method

〇Takuma Yamashita¹, Abe Narumi¹, Kumagae Yuki¹, Obana Hiroki¹, Hamada Tatsuki², Yoshii ryo², Kubota Hiroshi¹, Hashishin Takeshi¹, Yoshioka masao² (1.Graduate school of science and technology Kumamoto Univ, 2.Kumamoto Univ)

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