Erika Sekiguchi

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 9:30 AM - 11:30 AM PB3 (PB)

Poster presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15a-PB3-1~12] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:30 AM - 11:30 AM

▲ [15a-PB3-12] Activation of Boron Atoms implanted in Sillicon at a low temperature

〇(B)Erika Sekiguchi¹, Tomokazu Nagao², Masahiko Hasumi¹, Yutaka Inouchi², Junichi Tatemichi², Toshiyuki Sameshima¹ (1.TUAT, 2.NISSIN ION)