Nobuaki Tarumi

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 1:45 PM - 4:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[15p-A305-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:45 PM - 3:00 PM

[15p-A305-5] Analysis of crystal growth mechanism in amorphous Si films by in-situ heating TEM

〇Nobuaki Tarumi¹, Shohei Hayashi¹, Naohiko Kawasaki¹, Yuji Otsuka¹ (1.Toray Research Center)