Shunta Murai

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 4:00 PM - 6:00 PM PA9 (PA)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[13p-PA9-1~25] 13.7 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[13p-PA9-13] Impact of Cap Layer Materials Used for Long-Term Low-Temperature Annealing
on Electrical Properties of Mg-Ion-Implanted GaN

〇Shunta Murai¹, Ryo Kamoshida¹, Encheng Wu¹, Masamichi Akazawa¹ (1.RCIQE, Hokkaido Univ.)