Noriyuki Iguchi

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:45 PM - 5:15 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[12p-A305-1~13] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

4:45 PM - 5:00 PM

[12p-A305-12] Development of Via-Switch with Multi-Layered a-Si/SiN/a-Si Varistor

〇Noriyuki Iguchi¹, Naoki Banno¹, Koichiro Okamoto¹, Hideaki Numata¹, Masanori Hashimoto², Tadahiko Sugibayashi¹, Toshitsugu Sakamoto¹, Munehiro Tada¹ (1.NEC Corp., 2.Oosaka Univ.)

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