Tomoaki Oga

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Speaker, Author, Co-Author

Sun. Mar 15, 2020 1:45 PM - 4:45 PM D215 (11-215)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.3 Micro/Nano patterning and fabrication

[15p-D215-1~11] 7.3 Micro/Nano patterning and fabrication

3:30 PM - 3:45 PM

△ [15p-D215-7] Surface flattening of COP substrate by repeat thermal nanoimprint for growth of conductive oxide thin films

〇Tomoaki Oga¹, Atsushi Oshima¹, Naho Kaneko¹, Satoru Kaneko^2,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Tech, 2.KISTEC)