Hiroyuki Tanaka

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:00 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14a-A305-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:00 AM - 10:15 AM

[14a-A305-5] Sidewall planarization in Bosch process

〇Hiroyuki Tanaka^1,2, Hisato Ogiso^1,2, Shizuka Nakano^1,2, Yoshiyuki Nozawa^2,3, Toshihiro Hayami^2,3, Khumpuang Sommawan^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.SPPT)

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