Hayato Suzuki

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:45 PM - 5:15 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[12p-A305-1~13] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

3:30 PM - 3:45 PM

[12p-A305-7] Large-Scale Evaluation of MIM Devices Using High-Precision Current Measurement Array Test Circuit

〇Hayato Suzuki¹, Hyeonwoo Park¹, Akinobu Teramoto^2,3, Rihito Kuroda^1,3, Tomoyuki Suwa³, Shigetoshi Sugawa^1,3 (1.Grad. Sch. Eng., Tohoku Univ., 2.Res. Inst. for Nanodevice and Bio Systems, Hiroshima Univ., 3.NICHe, Tohoku Univ.)

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