Shigehisa Shibayama

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A303 (6-303)

Oral presentation
| Code-sharing Session
| 【CS.4】 Code-sharing Session of 6.1 & 13.3 & 13.5

[14p-A303-1~14] 【CS.4】 Code-sharing Session of 6.1 & 13.3 & 13.5

3:45 PM - 4:00 PM

△ [14p-A303-8] Abnormal ferroelectric phase formation mechanism of ZrO₂ thin film by wet annealing

〇Shigehisa Shibayama¹, Jotaro Nagano², Mitsuo Sakashita¹, Osamu Nakatsuka^1,3 (1.Nagoya Univ., 2.Sch. of Eng., Nagoya Univ., 3.IMaSS, Nagoya Univ.)