Masami Tanioku

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 9:30 AM - 11:30 AM PA2 (PA)

Poster presentation
| 17 Nanocarbon Technology
| 17 Nanocarbon Technology(Poster)

[12a-PA2-1~77] 17 Nanocarbon Technology

9:30 AM - 11:30 AM

[12a-PA2-50] Sensor Device Fabrication Process with SiN Passivated Graphene

〇Masami Tanioku¹, Takao Ono^1,2, Yasushi Kanai¹, Tomohiro Koyama¹, Naruto Miyakawa³, Syota Ushiba³, Masahiko Kimura³, Koichi Inoue¹, Daichi Chiba¹, Kazuhiko Matsumoto¹ (1.Osaka Univ. ISIR, 2.JST-PRESTO, 3.Murata Mfg.)

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