Kazuki Denpoh

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:15 PM - 6:00 PM A302 (6-302)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[12p-A302-1~18] 8.1 Plasma production and diagnostics

4:00 PM - 4:15 PM

[12p-A302-11] Effects of applied frequency on plasma density at Torr-order pressure region in capacitively coupled plasmas

〇Kazuki Denpoh¹, Yasushi Morita¹, Tatsuo Matsudo¹ (1.TTS)