Takeshi Aizawa

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:15 PM - 6:00 PM A302 (6-302)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and diagnostics

[12p-A302-1~18] 8.1 Plasma production and diagnostics

2:45 PM - 3:00 PM

[12p-A302-7] Correlation of OH Radical and Ashing Uniformity in Microwave Excited Water Vapor Plasma Ashing

〇Takeshi Aizawa¹, Taishin Shimada¹, Tasuku Sakurai¹, Tatsuo Ishijima¹, Yasunori Tanaka¹, Yoshihiko Uesugi¹, Yusuke Nakano¹, Itsuki Inoue², Ryo Ono² (1.Kanazawa Univ., 2.Univ. Tokyo)

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