Kazutaka Kanegae

→ Search for Kazutaka Kanegae in Google Scholar

Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:15 PM - 5:30 PM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[12p-B401-1~16] 13.7 Compound and power electron devices and process technology

2:00 PM - 2:15 PM

△ [12p-B401-4] Deep levels generated by RIE in n-type GaN layer

〇Kazutaka Kanegae¹, Shinji Yamada^2,3,4, Mashahiro Horita^1,3,4, Tsunenobu Kimoto¹, Jun Suda^1,3,4 (1.Kyoto Univ., 2.ULVAC ISET, 3.Nagoya Univ. IMaSS, 4.Nagoya Univ.)

▲