Yohei Tanaka

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:30 PM - 6:00 PM B410 (2-410)

Oral presentation
| 3 Optics and Photonics
| 3.7 Laser processing

[12p-B410-1~16] 3.7 Laser processing

5:30 PM - 5:45 PM

△ [12p-B410-15] Conditions for fine LIPSS formation induced with mid-infrared FEL for semiconductors – Thresholds of LIPSS formation and melting -

〇(M1C)Yohei Tanaka¹, Chikai Hosokawa¹, Masaki Hashida^1,2, Heishun Zen³, Takeshi Nagashima⁴, Norimasa Ozaki⁵, Shunsuke Inoue^1,2, Shuji Sakabe^1,2 (1.GSS, Kyoto Univ., 2.ICR, Kyoto Univ., 3.IAE, Kyoto Univ., 4.Setsunan Univ., 5.GSE, Kyoto Univ.)

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