Syunpei Kajita

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:30 PM - 3:30 PM PA2 (PA)

Poster presentation
| 7 Beam Technology and Nanofabrication
| 7 Beam Technology and Nanofabrication(Poster)

[12p-PA2-1~4] 7 Beam Technology and Nanofabrication

1:30 PM - 3:30 PM

[12p-PA2-2] Influence of polyalcohol in developer contact angle to novolac type positive-tone resist.

〇Syunpei Kajita¹, Yukiko Miyaji¹, Hideo Horibe² (1.Sakamoto Co.,Ltd., 2.Osaka-City Univ.)