Kazumasa Makise

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Speaker, Author, Co-Author

Thu. Mar 12, 2020 1:30 PM - 3:30 PM PA3 (PA)

Poster presentation
| 11 Superconductivity
| 11 Superconductivity(Poster)

[12p-PA3-1~33] 11 Superconductivity

1:30 PM - 3:30 PM

[12p-PA3-30] Evaluation and optimization of titanium nitride thin films by atomic layer deposition for superconducting quantum circuit applications II

〇Kazumasa Makise¹, Go Fujii¹, Masahiro Ukibe¹ (1.AIST)