Atsushi Hiraiwa

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 9:00 AM - 11:45 AM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[13a-B401-1~10] 13.7 Compound and power electron devices and process technology

9:00 AM - 9:15 AM

[13a-B401-1] Bias stability improvement of ALD-Al₂O₃/GaN capacitors by post-deposition annealing

Kiyotaka Horikawa¹, Hiroshi Kawarada^1,2,3, 〇Atsushi Hiraiwa^2,4 (1.FSE, Waseda Univ., 2.RONLI, Waseda Univ., 3.KMLMST, Waseda Univ., 4.IMaSS, Nagoya Univ.)