Takuya Nakashima

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 9:00 AM - 11:45 AM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[13a-B401-1~10] 13.7 Compound and power electron devices and process technology

11:30 AM - 11:45 AM

△ [13a-B401-10] Evolution of defect in Mg ions-implanted GaN upon high temperature and ultrahigh N₂ pressure annealing: Transmission electron microscopy analysis

〇(B)Takuya Nakashima¹, Hideki Sakurai^1,2,3, Sigeo Arai², Kenji Iwata¹, Tetsuo Narita⁴, Keita Kataoka⁴, Michal Bockowski^2,5, Masahiro Nagao², Jun Suda¹, Tetsu Kachi², Nobuyuki Ikarashi² (1.Nagoya Univ., 2.Nagoya Univ. IMaSS, 3.ULVAC ISET, 4.Toyota Central R&D Labs., 5.Unipress)