Hideki Sakurai

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 9:00 AM - 11:45 AM B401 (2-401)

Oral presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[13a-B401-1~10] 13.7 Compound and power electron devices and process technology

11:15 AM - 11:30 AM

[13a-B401-9] Demonstration of acceptor formation in Mg- and N-ions implanted GaN by ultra-high-pressure annealing

〇Hideki Sakurai^1,2,3, Tetsuo Narita⁴, Kazufumi Hirukawa², Shinji Yamada^1,2,3, Akihiko Koura³, Keita Kataoka⁴, Masahiro Horita^1,2, Michal Bockowski^1,5, Jun Suda^1,2, Tetsu Kachi¹ (1.Nagoya Univ. IMaSS, 2.Nagoya Univ., 3.ULVAC ISET, 4.ToyotaCentralR&DLabs, 5.UNIPRESS)

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