Kenta Chokawa

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 9:30 AM - 11:30 AM PA6 (PA)

Poster presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[13a-PA6-1~11] 15.6 Group IV Compound Semiconductors (SiC)

9:30 AM - 11:30 AM

[13a-PA6-2] Prediction of gas phase reactions and surface structures under the CVD process of SiC with HCl gas

〇(PC)Kenta Chokawa¹, Yoshiaki Daigo², Ichiro Mizushima^2,3, Takashi Yoda^2,3, Kenji Shiraishi¹ (1.IMass, Nagoya Univ., 2.NuFlare Technology, 3.First, Tokyo Tech.)

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