Vignesh Viswanathan

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 1:30 PM - 5:15 PM A303 (6-303)

Symposium (Oral)
| Symposium
| Recent progress in Advanced Ion Microscopy: Application to nano materials and devices

[13p-A303-1~9] Recent progress in Advanced Ion Microscopy: Application to nano materials and devices

4:45 PM - 5:15 PM

▲ [13p-A303-9] Application of Neon Ion Beam for Processing III-V Semiconductors and Atom Probe Sample Preparation of Ga sensitive materials

〇Vignesh Viswanathan¹, Deying Xia², Hanfang Hao¹, John Notte² (1.Carl Zeiss Pte Ltd, 2.Carl Zeis SMT Inc.)