Hiroto Ishii

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 1:45 PM - 5:45 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.5 Semiconductor devices/ Interconnect/ Integration technologies

[13p-A305-1~13] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

5:15 PM - 5:30 PM

△ [13p-A305-12] Surface orientation dependence of Ge channel flattening process on Ge nMOSFETs

〇Hiroto Ishii^1,2, Wen Hsin Chang¹, Toshifumi Irisawa¹, Wataru Mizubayashi¹, Hiroyuki Ishii¹, Tatsuro Maeda^1,2 (1.AIST, 2.TUS)