Kazuyuki Uno

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 1:45 PM - 6:15 PM D419 (11-419)

Oral presentation
| Joint Session K "Wide bandgap oxide semiconductor materials and devices"
| 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[13p-D419-1~16] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

2:30 PM - 2:45 PM

[13p-D419-3] Growth of α-Ga₂O₃ thin films by mist chemical vapor deposition using acetylacetonated Ga source solutions

〇Kazuyuki Uno¹, Marika Ohta¹, Ichiro Tanaka¹ (1.Wakayama Univ.)