Masami Aono

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 4:00 PM - 6:00 PM PA8 (PA)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[13p-PA8-1~20] 6.2 Carbon-based thin films

4:00 PM - 6:00 PM

[13p-PA8-10] Investigation of Thermal Expansion Coefficients of Amorphous Carbon and Amorphous Carbon Nitride Thin Films Prepared through Sputtering

〇Masami Aono¹, Hisashi Miyazaki², Takaaki Kasuga³, Masaya Nogi³ (1.Kagoshima Univ., 2.NDA, 3.Osaka Univ.)