ZHENTAO ZHAO

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 4:00 PM - 6:00 PM PA8 (PA)

Poster presentation
| 6 Thin Films and Surfaces
| 6.2 Carbon-based thin films

[13p-PA8-1~20] 6.2 Carbon-based thin films

4:00 PM - 6:00 PM

[13p-PA8-11] Fabrication and structural analysis of a-CNx:H films formed from the RF plasma CVD of the C₆H₁₂/N₂ gas mixtures

〇(B)ZHENTAO ZHAO¹, Yoshinori Karoh¹, Haruhiko Ito¹ (1.Nagaoka Univ. of Tech.)