Taketomo Sato

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Speaker, Author, Co-Author

Fri. Mar 13, 2020 4:00 PM - 6:00 PM PA9 (PA)

Poster presentation
| 13 Semiconductors
| 13.7 Compound and power electron devices and process technology

[13p-PA9-1~25] 13.7 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[13p-PA9-11] Characterization of ICP-RIE-processed n-GaN surface using an electrochemical method

Kentaro Takeda¹, Shinji Yamada^2,3, Masachika Toguchi¹, Tetsu Kachi², 〇Taketomo Sato¹ (1.Hokkaido Univ. RCIQE, 2.Nagoya Univ. IMaSS, 3.ULVAC ISET)