Yongxun Liu

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:00 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14a-A305-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

9:00 AM - 9:15 AM

[14a-A305-1] Development of CMOS-MEMS Cointegrated Pressure Sensor Using Minimal-Fab Process

〇Yongxun Liu¹, Ippei Akita¹, Takashi Matsukawa¹, Hiroyuki Tanaka^1,2, Kazuhiro Koga², Kazumasa Nemoto¹, Sommawan Khumpuang^1,2, Masayoshi Nagao¹, Yukinori Morita¹, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

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