Kazuhiro Koga

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:00 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14a-A305-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

10:15 AM - 10:30 AM

[14a-A305-6] Development of 2-Layer Al Wiring process by Minimal Fab (2)

〇Kazuhiro Koga¹, Masashi Kase², Kazushige Sato¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.MIN IMAL, 2.AIST)