Satoshi Fujii

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:00 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14a-A305-1~11] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

11:00 AM - 11:15 AM

[14a-A305-8] Fabrication of SAW resonators on single-crystal diamonds using Minimal-Fab process III

〇Satoshi Fujii¹, Haruki Toonoe², Yasunori Shiba², Manelli Dario³, Motoi Tokuda³, Takashi Ooe³, Koji Kosaka³, Shiro Hara⁴ (1.NIT, Okinawa Coll., 2.Yokogawa S.S., 3.TCK, 4.AIST)

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