Taichi Konno

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 11:45 AM B408 (2-408)

Oral presentation
| 11 Superconductivity
| 11.5 Junction and circuit fabrication process, digital applications

[14a-B408-1~10] 11.5 Junction and circuit fabrication process, digital applications

9:45 AM - 10:00 AM

△ [14a-B408-4] Niobium Etching Characteristics by Neutral Beam

〇(B)Taichi Konno¹, Daisuke Ohori¹, Mutuo Hidaka³, Kazuhiko Endo³, Hiroto Mukai⁴, Jaw Shen Tsai⁴, Seiji Samukawa^1,2,3 (1.IFS, Tohoku Univ., 2.AIMR, Tohoku Univ., 3.AIST, 4.TUS)

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