CHANG LIU

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:00 PM B508 (2-508)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[14a-B508-1~11] 7.1 X-ray technologies

11:30 AM - 11:45 AM

▼ [14a-B508-10] Spectroscopic diagnostics of hydrogen radicals in EUV induced hydrogen plasma

〇(D)CHANG LIU¹, NOZOMI TANAKA¹, BAOJUN ZHU¹, KYUNGSIK KANG², YOUNGDUK SUH², JEONGGIL KIM², KEN OZAWA³, TAKESHI TAKAGI³, MINORU KUBO³, SHINSUKE FUJIOKA¹ (1.ILE Osaka Univ., 2.Samsung Co. Ltd., 3.Samsung R&D Inst.)

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