Nozomi Tanaka

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:00 PM B508 (2-508)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.1 X-ray technologies

[14a-B508-1~11] 7.1 X-ray technologies

11:15 AM - 11:30 AM

▲ [14a-B508-9] Cleaning of Sn layer in hydrogen plasma induced by intense pulsed EUV radiation

〇Nozomi Tanaka¹, Baojun Zhu¹, Chang Liu¹, Kyung Sik Kang², Youngduk Suh², Jeong-Gil Kim², Ken Ozawa³, Takeshi Takagi³, Minoru Kubo³, Shinsuke Fujioka¹ (1.ILE Osaka Univ., 2.Mechatronics R&D Center, Samsung Electronics Co. Ltd., 3.Samsung R&D Institute Japan)

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