Toshio Seki

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:15 AM - 12:00 PM D305 (11-305)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[14a-D305-1~10] 7.5 Ion beams

9:45 AM - 10:00 AM

[14a-D305-3] Simulation of secondary ion trajectory in MeV-SIMS under atmospheric pressure

〇Toshio Seki¹, Takaaki Aoki², Jiro Matsuo¹ (1.Grad. Sch. of Eng., Kyoto Univ., 2.ACCMS, Kyoto Univ.)