Kentaro Hirata

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:15 AM - 12:00 PM D305 (11-305)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[14a-D305-1~10] 7.5 Ion beams

11:00 AM - 11:15 AM

[14a-D305-7] Development of compact high energy gas cluster ion source and its applications to SIMS

〇(B)Kentaro Hirata¹, Toshio Seki¹, Takaaki Aoki¹, Jiro Matsuo¹ (1.Kyoto Univ.)