Taro Hayakawa

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:15 AM - 12:00 PM D305 (11-305)

Oral presentation
| 7 Beam Technology and Nanofabrication
| 7.5 Ion beams

[14a-D305-1~10] 7.5 Ion beams

11:15 AM - 11:30 AM

[14a-D305-8] Characteristics of large ion beams for ion beam etching

〇Taro Hayakawa¹, Yutaka Inouchi¹, Tadashi Ikejiri¹ (1.Nissin ion equipment)