Takeshi Kitajima

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 10:15 AM D311 (11-311)

Oral presentation
| 8 Plasma Electronics
| 8.3 Plasma nanotechnology

[14a-D311-1~5] 8.3 Plasma nanotechnology

9:30 AM - 9:45 AM

[14a-D311-3] Radical Nitridation of Silicon by Gold Nanoparticle Plasmon and SiON film property

Machiko Miyake¹, Shoma Kuwata¹, 〇Takeshi Kitajima¹, Toshiki Nakano¹ (1.Nat. Def. Acad.)