Yuki Saho

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:15 PM D419 (11-419)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[14a-D419-1~12] 6.1 Ferroelectric thin films

9:00 AM - 9:15 AM

[14a-D419-1] Effect on crystal structure and the dielectric properties of HfO₂:Y/Si films by oxygen partial pressure during deposition

〇Yuki Saho¹, Kenshi Takada¹, Takeshi Yoshimura¹, Norifumi Fujimura¹ (1.Osaka Pref Univ.)