Tadaki Mizuno

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:15 PM D419 (11-419)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[14a-D419-1~12] 6.1 Ferroelectric thin films

9:15 AM - 9:30 AM

[14a-D419-2] Al2O3 Atomic Layer Deposition Using a Novel High Concentration H2O2 gas
Delivery System (Peroxidizer®)

Gaku Tsuchibuchi¹, 〇Tadaki Mizuno¹, Keisuke Andachi¹, Hayato Murata¹, Katsumasa Suzuki¹, Daniel Alvarez Jr.², Jeffery Spiegelman² (1.TAIYO NIPPON SANSO Corp., 2.RASIRC inc.)