Shinnosuke Yasuoka

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:00 AM - 12:15 PM D419 (11-419)

Oral presentation
| 6 Thin Films and Surfaces
| 6.1 Ferroelectric thin films

[14a-D419-1~12] 6.1 Ferroelectric thin films

10:30 AM - 10:45 AM

△ [14a-D419-6] Effect of deposition condition on the ferroelectric properties of (Al_1-xSc_x)N thin films.

〇(M1)Shinnosuke Yasuoka¹, Takao Shimizu^1,2, Masato Uehara³, Hiroshi Funakubo¹ (1.Tokyo tech, 2.NIMS, 3.AIST)