Tomoki Oku

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 9:30 AM - 11:30 AM PA4 (PA)

Poster presentation
| 13 Semiconductors
| 13.3 Insulator technology

[14a-PA4-1~5] 13.3 Insulator technology

9:30 AM - 11:30 AM

[14a-PA4-2] Penetration barrier of alkali metal and halogen ions into SiO₂ and Si₃N₄ films

〇Tomoki Oku¹, Masahiro Totsuka¹, Hajime Sasaki¹ (1.Mitsubishi Electric)