Masaki Hasegawa

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

1:45 PM - 2:00 PM

[14p-A305-1] [Young Scientist Presentation Award Speech] Dependence of chlorine adsorption layer on ion energy on Ar ion-irradiated GaN surface (2)

〇Masaki Hasegawa¹, Takayoshi Tsutsumi¹, Atsushi Tanide^1,2, Hiroki Kondo¹, Makoto Sekine¹, Kenji Ishikawa¹, Masaru Hori¹ (1.Nagoya Univ., 2.SCREEN Holdings Co., Ltd.)

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