Shuichi Murakami

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:15 PM - 4:30 PM

[14p-A305-10] Characterization of Piezoelectric MEMS Vibration Energy Harvesters using Lead-Free BiFeO₃ Film under Random Oscillation

〇Shuichi Murakami¹, Takeshi Yoshimura², Yusuke Kanaoka¹, Kazuo Satoh¹, Kazuki Tsuda¹, Norifumi Fujimura² (1.ORIST, 2.Osaka Pref. Univ.)