Ken Atsumi

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

4:30 PM - 4:45 PM

△ [14p-A305-11] A Study on Single-Proof-Mass 3-axis MEMS Accelerometer
with Pillar-Shaped Electrodes

〇(M2)Ken Atsumi¹, Tatsuya Koga¹, Takashi Ichikawa¹, Daisuke Yamane¹, Shin-ichi Iida², Hiroyuki Ito¹, Noboru Ishihara¹, Katsuyuki Machida¹, Kazuya Masu¹ (1.Tokyo inst., 2.NTT-AT)