Yurina Amamoto

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

5:00 PM - 5:15 PM

[14p-A305-13] Development of high temperature platinum microheater

〇Yurina Amamoto¹, Shunsuke Akasaka¹, Isaku Kanno² (1.ROHM, 2.Kobe Univ.)