RengieMark Domincel Mailig

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Speaker, Author, Co-Author

Sat. Mar 14, 2020 1:45 PM - 5:30 PM A305 (6-305)

Oral presentation
| 13 Semiconductors
| 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[14p-A305-1~14] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:00 PM - 2:15 PM

▲ [14p-A305-2] The low temperature fabrication of gate-first Schottky barrier pMOSFET with PdErSi source and drain

〇RengieMark Domincel Mailig¹, Yuichiro Aruga¹, Min Gee Kim¹, Shun-ichiro Ohmi¹ (1.Tokyo Tech)